发明名称 |
Sealant films for materials having high intrinsic vapor pressure |
摘要 |
A sealant film is employed to migrate species having a high intrinsic vapor pressure through a solid body of semiconductor material by temperature gradient zone melting.
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申请公布号 |
US4198247(A) |
申请公布日期 |
1980.04.15 |
申请号 |
US19780967281 |
申请日期 |
1978.12.07 |
申请人 |
GENERAL ELECTRIC |
发明人 |
ANTHONY, THOMAS R;CLINE, HARVEY E;HOUSTON, DOUGLAS E |
分类号 |
H01L21/24;(IPC1-7):H01L21/22 |
主分类号 |
H01L21/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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