发明名称 Sealant films for materials having high intrinsic vapor pressure
摘要 A sealant film is employed to migrate species having a high intrinsic vapor pressure through a solid body of semiconductor material by temperature gradient zone melting.
申请公布号 US4198247(A) 申请公布日期 1980.04.15
申请号 US19780967281 申请日期 1978.12.07
申请人 GENERAL ELECTRIC 发明人 ANTHONY, THOMAS R;CLINE, HARVEY E;HOUSTON, DOUGLAS E
分类号 H01L21/24;(IPC1-7):H01L21/22 主分类号 H01L21/24
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