发明名称 METHOD OF BONDING REFRACTORY METAL CONTACT MEMBER TO SEMICONDUCTOR
摘要 <p>The invention provides a method for bonding a refractory metal contact 18'/20' to a semiconductor body 12' in which a silver-germanium alloy 44/46 is interposed between the surface of the refractory metal contact member and the surface of the semiconductor body. The assembly is then heated until the alloy enters the slush state. The assembly is thereafter rapidly quenched to freeze the alloy, thereby forming a high-strength bond. Typically, the alloy comprises 85-99% Ag and 15-1% Ge. In one example, the assembly is heated to a temperature of about 835 DEG C. <IMAGE></p>
申请公布号 JPS5550621(A) 申请公布日期 1980.04.12
申请号 JP19790120950 申请日期 1979.09.21
申请人 发明人
分类号 H01L21/52;H01L21/60;H01L23/31;H01L23/492 主分类号 H01L21/52
代理机构 代理人
主权项
地址