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发明名称
PREPARATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5550640(A)
申请公布日期
1980.04.12
申请号
JP19780122626
申请日期
1978.10.06
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
SHIBATA SUNAO
分类号
H01L29/78;H01L21/3205;H01L23/52
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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