发明名称 Surface improvement of ceramic substrates for resistors etc
摘要 <p>Improvement of the surfaces of ceramic oxides (Al or Be) by coating with a layer of Ta oxide then annealing at over 1,000 degrees C. The oxide layer is formed by (a) spraying with Ta to give 500-800 angstroms thick coating and oxidising, (b) dipping in Ta alkylate solns. and oxidising, (c) hydrolysis of Ta halogenide and sintering etc. Used for the prodn. of thin film condensers and resistors.</p>
申请公布号 DE2006988(A1) 申请公布日期 1971.09.16
申请号 DE19702006988 申请日期 1970.02.16
申请人 SEL 发明人
分类号 C04B41/50;C04B41/87;H01L21/48;H01L49/02;(IPC1-7):04B41/06 主分类号 C04B41/50
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