发明名称 SEMICONDUCTOR ISOLATION METHOD
摘要 <p>A semiconductor device in which a zone of insulating material separates two deep regions from each other. The inversion layer which is caused at the edge of the insulating layer is compensated by means of a layer obtained via ion implantation prior to providing an epitaxial layer.</p>
申请公布号 CA1075374(A) 申请公布日期 1980.04.08
申请号 CA19770271539 申请日期 1977.02.10
申请人 N.V. PHILIPS'GLOEILAMPENFABRIEKEN 发明人 DE BREBISSON, MICHEL
分类号 C30B19/00;C30B25/18;C30B31/22;H01L21/205;H01L21/74;H01L21/76;H01L21/762;(IPC1-7):01L21/94 主分类号 C30B19/00
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