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发明名称
METHOD OF DIFFUSING OPEN TUBE ALUMINUM
摘要
申请公布号
JPS5548925(A)
申请公布日期
1980.04.08
申请号
JP19790112473
申请日期
1979.09.04
申请人
GEN ELECTRIC
发明人
MAIKU FUTSUSHINGU CHIYANGU;ARUFURETSUDO ROOSUCHI
分类号
H01L21/22;H01L21/223
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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