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发明名称
摘要
申请公布号	JPS5513135(B1)	申请公布日期	1980.04.07
申请号	JP19710029418	申请日期	1971.05.01
申请人		发明人
分类号	H01L21/3205;G11C17/00;H01L21/82;H01L21/8229;H01L23/52;H01L27/10;H01L27/102;(IPC1-7):H01L21/88	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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