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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5546539(A)
申请公布日期
1980.04.01
申请号
JP19780119816
申请日期
1978.09.27
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAJI YASUHIRO;SAIKAI HIROSHI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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