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发明名称
ELECTRON MICROSCOPE
摘要
申请公布号
JPS5546465(A)
申请公布日期
1980.04.01
申请号
JP19780120898
申请日期
1978.09.29
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
SHIMURA FUMIO
分类号
H01J37/04;H01J37/26;H05H5/00
主分类号
H01J37/04
代理机构
代理人
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