发明名称 METHOD OF DIVIDING SEMICONDUCTOR WAFERS
摘要 A method of dividing semiconductor wafers, wherein a masking layer is applied to a surface of the semiconductor wafer and the wafer is cut by means of an etching solution applied to the masked surface. The method includes the step of vaporizing a metal layer consisting of chromium onto the semiconductor wafer to form the masking layer.
申请公布号 US3634161(A) 申请公布日期 1972.01.11
申请号 USD3634161 申请日期 1968.07.26
申请人 LICENTIA PATENT-VERWALTUNGS-GMBH. 发明人 RIGOBERT SCHIMMER;HORST GESING
分类号 H01L21/00;H01L21/308;H01L21/78;(IPC1-7):H01L7/00;H01L7/50 主分类号 H01L21/00
代理机构 代理人
主权项
地址