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发明名称
DRUCKEMPFINDLICHE EINRICHTUNG UND VERFAHREN ZU IHRER HERSTELLUNG
摘要
申请公布号
DE2938240(A1)
申请公布日期
1980.03.27
申请号
DE19792938240
申请日期
1979.09.21
申请人
HITACHI,LTD.
发明人
MATSUOKA,YOSHITAKA;SHIMAZOE,MICHITAKA;YAMAMOTO,YOSHIMI;AI,MITSUO;MIYAUCHI,KENJI;NEMOTO,HIDEYUKI;TSUCHIYA,MASATOSHI;TANABE,MASANORI
分类号
G01L9/04;G01L9/00;H01L29/84;(IPC1-7):G01L9/08
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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