发明名称 ELECTRON BEAM RADIATING DEVICE
摘要 PURPOSE:To enalbe an electronic beam radiating device to be utilized for a solid forming beam and a Gaussian spot by providing in a position in fornt of a radiating lens a lens designed capable of being switched either to transmission of electronic beam or focusing of the same. CONSTITUTION:Provided in a position in front of a radiating lens 11 is an electrostatic lens 6 designed capable of being switched to either transmission or focusing of electronic beam having made a crossover image 5 in the center of a blanking board 4 by a condenser lens 3 with electronic beam radiated from a crossover 2 made by an electronic gun 1. The figure demonstrates utilization of Guassian spot which focusing an electronic beam, makes a crossover image 16 in the center of a forming slit 7 and forms an image on a base board provided on the bottom.
申请公布号 JPS5543809(A) 申请公布日期 1980.03.27
申请号 JP19780115182 申请日期 1978.09.21
申请人 NIPPON TELEGRAPH & TELEPHONE 发明人 TAKEUCHI YOSHINOBU;TAKAMOTO KIICHI;MATSUDA KOREHITO
分类号 H01J37/305;H01J37/30;H01L21/027 主分类号 H01J37/305
代理机构 代理人
主权项
地址