发明名称 |
ELECTRON BEAM RADIATING DEVICE |
摘要 |
PURPOSE:To enalbe an electronic beam radiating device to be utilized for a solid forming beam and a Gaussian spot by providing in a position in fornt of a radiating lens a lens designed capable of being switched either to transmission of electronic beam or focusing of the same. CONSTITUTION:Provided in a position in front of a radiating lens 11 is an electrostatic lens 6 designed capable of being switched to either transmission or focusing of electronic beam having made a crossover image 5 in the center of a blanking board 4 by a condenser lens 3 with electronic beam radiated from a crossover 2 made by an electronic gun 1. The figure demonstrates utilization of Guassian spot which focusing an electronic beam, makes a crossover image 16 in the center of a forming slit 7 and forms an image on a base board provided on the bottom. |
申请公布号 |
JPS5543809(A) |
申请公布日期 |
1980.03.27 |
申请号 |
JP19780115182 |
申请日期 |
1978.09.21 |
申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
TAKEUCHI YOSHINOBU;TAKAMOTO KIICHI;MATSUDA KOREHITO |
分类号 |
H01J37/305;H01J37/30;H01L21/027 |
主分类号 |
H01J37/305 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|