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发明名称
VAKUUMBEHAELTER
摘要
申请公布号
DE2900057(A1)
申请公布日期
1980.03.27
申请号
DE19792900057
申请日期
1979.01.02
申请人
ULVAC CORP.
发明人
HAYASHI,CHIKARA
分类号
F16L23/16;B01J3/00;B01J19/02;C23C14/06;C23C14/56;(IPC1-7):B01J3/00;B01J1/20
主分类号
F16L23/16
代理机构
代理人
主权项
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