| 摘要 |
PURPOSE:To perform an uniform spin coating on base plate by the procedure in which coating liquid is supplied while rotating base plate and also moving coating liquid supply nozzles toward the radial direction of base plate, and then spin coating is made while rotating the base plate with high speed. CONSTITUTION:While rotating the base plate 10 with a low speed of 50-150rpm and also moving the supply nozzle 11 from which a quick-drying coating liquid such as gelatin-silver halide emulsion, etc., is supplied toward the radial direction of the base plate 10, the coating liquid is supplied through the nozzle 11 onto the base plate 10, whereupon the coating liquid is coated uniformly on the base plate 10 throughout. Afterwards, the base plate 10 is rotated with a high speed based on a revolving number according to the thickness of coat and the viscosity and solid content of coating liquid. Such a spin coating method enables one to form a coat of desired thickness on the base plate 10.
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