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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5541731(A)
申请公布日期
1980.03.24
申请号
JP19780114441
申请日期
1978.09.18
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
YAMAMOTO KAZUHIKO;MATSUSHITA YOSHIAKI
分类号
H01L21/60;H01L21/28;H01L21/768;H01L29/43
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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