| 摘要 |
PURPOSE:To enable a nice X-ray analysis by providing an adjustable squeezing hole between a sample and an X-ray detector. CONSTITUTION:An X-ray 5 emitted from a sample 4 by illuminating an electron beam 3 converged with an electro-magnetic lens 1 is made formed to shoot into an X-ray detecting element 6 through holes 13, 14 opened in a lens magnetic route 1 and X-ray squeezer 8. The X-ray squeezer 8 is made from a material such as Aluminium, coated with carbon films to absorb characteristic X-rays of Aluminium upon surfaces and has squeezer holes 8-1, 8-2 of different diameters. Control of the squeezer holes is performed by a controller 9 outside of a vacuum vessel 10. In this manner, X-ray excited by reflecting electron, scattered X-ray etc. other than those necessary X-rays to the detecting element 6 are suppressed to go into the detecting element 6 and a nice X-ray analysis can be performed. |
