| 摘要 |
PURPOSE:To manufacture such thin film as is surpassing in evenness, stability, reproducibility and also high in practicability by ionizing a part of the atom constituting an atomic group and projecting it to vacuum vaporization onto a substrate. CONSTITUTION:Solid Mn 12 and Bi 13 are put in closed crucibles 11A, 11B in a high vaccum of bell jar respectively, and the crucibles 11A, 11B are heated up to a given temperature to vaporize Mn 12 and Bi 13. The vapor is then spouted through jet holes 14A, 14B into the bell jar. Vapors of Mn 12 and Bi 13 are lumped to a group by supercooling phenomenon according to adiabatic expansion. Then, the vapor is spouted onto a substrate 15 by a large kinetic energy arising at injecting the lumpish group, the atom constituting a cruster is spread on the surface of the substrate 15, and atoms of Mn and Bi are spattered on the substrate 15 to form an Mn-Bi thin film. |
