| 摘要 |
PURPOSE:To separate the contrast of magnetism from the contrast of irregularities by providing a secondary electron detecting means and an energy analyzing means and displaying an image with the difference or ratio between signals by secondary electrons with low energy and high energy. CONSTITUTION:In an electron beam device provided with a finely condensed electron beam and a scanning means scanning this electron beam on a sample 2, a secondary electron detector 4 detecting only the secondary electrons scattered in the specific direction and an analyzer 11 controlling the energy width of the secondary electrons fed into this detector are provided, the secondary electron signal with low energy and the secondary electron signal with high energy are separated and multiplied by a constant, the difference signal is image-formed. Only the contrast of magnetism can be extracted for observation from the image mixed with the contrast of magnetism and the contrast of irregularities of the scan type electron microscope image. |
