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发明名称
METHOD AND MEANS FOR COMPENSATING FOR CHARGE CARRIER BEAM ASTIGMATISM
摘要
申请公布号
GB2029179(A)
申请公布日期
1980.03.12
申请号
GB19790024804
申请日期
1979.07.17
申请人
AMRAY INC
发明人
分类号
G01Q30/06;H01J37/153;(IPC1-7):H01J29/56
主分类号
G01Q30/06
代理机构
代理人
主权项
地址
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