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发明名称
METHOD AND DEVICE FOR FILMMTHICKNESS MEASUREMENT MAKING USE OF INFRAREDDRAY INTERFERENCE
摘要
申请公布号
JPS5535214(A)
申请公布日期
1980.03.12
申请号
JP19780107547
申请日期
1978.09.04
申请人
ASAHI DOW LTD
发明人
YASUJIMA FUMITAKA;ISHIKAWA SHINGO
分类号
G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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