| 摘要 |
PURPOSE:To remarkably extend the life of work oil and pump material of a vacuum pump in a pressure-reduced reactor by providing multistage cooling surface refrigerating pump in the intermediate between the reactor and the vacuum pump system. CONSTITUTION:Refrigerant produced in a cycle of a compressor and refrigerating machine is passed through a pipe 11 to cool the cooling surface 6 and through a pipe 12 surrounding the outside of the pipe 11 again to the compressor circularly. Cooling surfaces 7, 8 are connected to the cooling surface 6 via metallic rods 9, 10 of different diameter and length from each other. The temperatures of the surfaces 7, 8 can be controlled by altering the diameter d and length h or quality of material of the rods 9, 10. Thus, water of low liquefying temperature is, for example, almost collected with the surface 8, and most halogenide is evacuated at the surface 7. Accordingly, corrosive gas can be mostly collected at the front stage of the vacuum pump. |
