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发明名称
摘要
申请公布号
JPS5534645(U)
申请公布日期
1980.03.06
申请号
JP19780117371U
申请日期
1978.08.29
申请人
发明人
分类号
H01L21/60;(IPC1-7):H01L21/92
主分类号
H01L21/60
代理机构
代理人
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地址
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