| 摘要 |
PURPOSE:To make pit depth even and also to improve size precision by using a specific inorganic film to fix the pit depth in manufacture of an information plate of a video disc, etc. CONSTITUTION:On glass substrate 1, thin metal films 2 are formed according to a pit pattern. On films 2, inorganic (MgF2, etc.) film 6 which light for resist exposure penetrates is formed by vapor-deposition, etc., as thick as the pit depth. On film 6, resist films 7 are formed and exposed and developed via films 2 from the reverse of substrate 1 to form pattern 7 with reverse unevenness to films 2. Pattern 7 is used as a mask for etching to remove unneeded parts of MgF2 layer 6 and the mask, i.e. films 7 are removed next. Then, metal layer 8 is formed by plating and separated into mothers. The uneven surface of mothers is plated to form a stamper, which is used to press vinyl chloride. |
