| 摘要 |
<p>PURPOSE:To curtail the production time, by placing a mask pattern on a glass substrate, putting plural circuit patterns thereon, temporarily fitting them by matching each land, placing and adhering a film thereon, and making a photo mask by separating the temporary fitting. CONSTITUTION:A master pattern 3 having positioning holes 6 and forming a plurality of common lands is set on a glass substrate 1, with the film side above, by matching the positioning holes 6 with the positioning pins 2 on the glass substrate 1. A desired circuit pattern 4 is cut to a proper number of pieces in a proper size, and, with the film side down, temporarily fitted with gluing fluid by matching with the common lands of the master pattern. A quick-drying transparent adhesive is spread on the circuit pattern 4. A base film 5 which transmits the light sufficiently and is drilled with positioning holes is put on and adhered to the circuit pattern 4 by utilizing the positioning holes 6 and pins 2. Then, by removing the temporarily fitted part above, a desired photo mask is completed.</p> |
