| 摘要 |
In a magnetic deflection system for deflecting a beam of charged particles, through a given beam bending angle at least four beam deflecting stations are serially arranged along the beam path for bending the beam through the beam bending angle PSI . Each of the beam bending stations includes a magnet for producing a static magnetic field component of a strength and of a shape so that the beam is deflected free of transverse geometric aberrations of second order. The beam deflection system also includes sextupole magnetic field components of such a strength and location so as to eliminate second order chromatic aberrations of the deflected beam without introducing second order geometric aberrations, whereby a magnetic beam deflection system is provided which is free of both transverse chromatic and geometric aberrations of second order.
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