| 摘要 |
PURPOSE:To prevent aging deterioration by eliminating local strain convergence by gradually reducing the line-part thickness of an electrode film on the main surface of a piezoelectric vibrator. CONSTITUTION:Into piezoelectric member 1, spacer 5 of about 50mum is inserted and vapor-deposition by vapor-deposition source 7 is carried out via mask 6 with member 1 tilted. As a result, a metal film intrudes under the mask as shown by 2.3 and its film thickness is reduced gently. Consequently, the strain distribution of the piezoelectric member lessens as compared with that of a conventional photoetching method. The reduction in strain of the metal film decreases an equivalent resistance, so that an aging deterioration will lessen. |
