| 摘要 |
A universal self-aligning rack for carrying and holding substrates of different sizes and shapes during the processing of the substrates. The rack includes first and second spaced substrate supports which are pivotal about parallel axes. Each support includes a pair of spaced elongated elements parallel to the axes, formed with tapered circumferential grooves oriented perpendicularly to the axes. The substrates to be supported are arranged parallel to one another in planes perpendicular to the axes and are supported at their edges in the grooves in respective elongated elements, which elements pivot to appropriate supporting positions in response to the placement of the substrates in the rack.
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