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发明名称
REACTIVE SPUTTERING
摘要
申请公布号
AU507748(B2)
申请公布日期
1980.02.28
申请号
AU19770025141
申请日期
1976.06.10
申请人
UNIVERSITY OF SYDNEY, THE
发明人
G.L. HARDING;D.R. MCKENZIE;B. WINDOW
分类号
C23C14/06;C23C14/00;C23C14/24;C23C14/34;C23C14/50;(IPC1-7):C23C15/00;H01J37/34
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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