| 摘要 |
PURPOSE:To make it possible to conduct plural metallization automatically and simultaneously at a high degree of precision in vacuum metallization by resistance heating, by determining the center value of power to be supplied in the next time interval on the basis of the difference between the center value of the set power to be supplied to a time interval and the power actually supplied in the time interval. CONSTITUTION:At first an objective metallizing rate V and the objective center value Ac of the power to be supplied to a metallizing source in a time interval T1 are determined. When the value Ac is larger than the mean value of the power actually supplied to the metallizing source, the center value Ac for the next time interval T2 is determined by decreasing a value given by multiplying the difference between both the values with a constant from the center value Ac, i.e., the value Ac for the next time interval T2 is smaller than that for the time interval T1. Hereby, the center value of the power to be supplied in the next time interval is determined based on the difference between the set center value of the power to be supplied in a time interval and the mean value of the power actually supplied in the time interval. |
