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发明名称
PHOTOORESIST PATTERN FORMING METHOD
摘要
申请公布号
JPS5527639(A)
申请公布日期
1980.02.27
申请号
JP19780100666
申请日期
1978.08.18
申请人
FUJITSU LTD
发明人
TSUTSUMI SHIYOUICHI;KUME TOMIO;TAKAHASHI YOSHIO
分类号
G03F7/20;H01L21/027;H01L21/302
主分类号
G03F7/20
代理机构
代理人
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地址
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