摘要 |
PURPOSE:To form a coating material sufficiently thickly on the surface of a wire rod by previously replacing the air near the surface of the wire rod with a low-dynamic viscosity gas at the time of subjecting the wire rod surface to coating by a vapor phase method. CONSTITUTION:For example, a fiber 1 to be coated is introduced into a differential discharge chamber 4. The fiber 1 is in succession introduced into a chamber 2, into which the gas for replacement is supplied, of a replacement device 2 equipped with the chamber 21 for replacement, a supply port 22 for the low- dynamic viscosity gas for replacement, and a heater 23 to replace the air on the fiber 1 surface with the gas for replacement. The fiber 1 is then introduced into a coating device 3 and is passed through a plasma flame 33 generated by a high-frequency source 34 to form the coated fiber 1' deposited by evaporation with the coating material formed by reaction with plasma heat to a sufficient thickness. The low-dynamic viscosity gas refers to the gas which does not cling to the surface of the traveling wire-shaped body and has the assisting effect to cause a rapid vapor phase reaction on the surface of the wire-shaped body. Said gas refers to gaseous hydrocarbon halide such as CF4, CCl2 and F2. |