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发明名称
摘要
申请公布号
JPS5529579(U)
申请公布日期
1980.02.26
申请号
JP19780113437U
申请日期
1978.08.17
申请人
发明人
分类号
H01L21/822;H01L21/331;H01L27/04;H01L29/72;H01L29/73;(IPC1-7):H01L27/04
主分类号
H01L21/822
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代理人
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