Turbomolecular high-vacuum pulp

摘要

A turbomolecular high-vacuum pump has a substantially vertically extending cylindrical casing provided with inlet and outlet pipes for gas being evacuated. The casing accommodates, in the top part thereof, a stator having vanes disposed between the rotor vanes so as to define passages for gas being evacuated. The rotor is connected to a high-speed hollow shaft extending substantially vertically. The shaft is journalled in bearings and connected to the rotor by means of a high-frequency electric drive motor. The pump incorporates means for lubricating the bearings. The stator of the high-frequency drive motor of the pump is electrically coupled to the stator of a generator of a machine-type frequency converter which has an induction drive motor. Another, low-speed shaft is journalled in the bearings in the bottom part of the pump casing coaxially with the high-speed shaft, one shaft embracing the other. The induction motor rotor and the rotor of the generator of the machine-type frequency converter are mounted on the low-speed shaft, the stators of both devices being fixed within the pump casing. Means for lubricating the bearings of both shafts is disposed at the lower end of the low-speed shaft.