METHOD OF MANUFACTURING SILICON SEMICONDUCTOR DEVICE,申请号JP19780096168-传众专利搜索

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发明名称	METHOD OF MANUFACTURING SILICON SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS5524410(A)	申请公布日期	1980.02.21
申请号	JP19780096168	申请日期	1978.08.09
申请人	HITACHI LTD	发明人	MOCHIZUKI YASUHIRO;YATSUNO KOUMEI;WAKUI TAKAYUKI
分类号	H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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