发明名称 DETECTING DEVICE OF BONDING FACE HEIGHT
摘要 PURPOSE:To secure a steady bonding through detecting bonding face height and setting proper bonding load and tail length by detecting accurately the instant at which a capillary comes in contact with bonding face. CONSTITUTION:A block 13 moves along with a block 22 travelling in the direction XY through bearing 21, and a capillary 11 on the tip of arm 10 mounted on the block 13 also moves in the direction XY. A female screw block 26 moves vertically according to clockwise or counterclockwise rotation of a motor 23, and the block 13 also joins in moving vertically to operate the capillary 11. Where the capillary comes in contact with the bonding face of a pellet 52 and the block 13 descends, a holder 12 moves around shaft 15, contact-makers 17, 19 are kept apart and the position whereat the capillary comes in contact is detected. A rotary encoder 24 is set for counting on the basis of detection signals, and bonding load of a wire 41 is selected to an optimal value. A tail length which is necessary for the capillary to form a bulb through ascending from a lead frame 51 on the second bonding point is determined on the basis of alforementioned signals.
申请公布号 JPS5524403(A) 申请公布日期 1980.02.21
申请号 JP19780096095 申请日期 1978.08.09
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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