| 摘要 |
A semiconductor wafer holder, for use in discharge and other processing apparatus, comprised of a non-magnetic frame having an opening defined by an inner wall for receiving a wafer. A non-magnetic circular flange extends out from the frame body over the inner wall forming a bottom surface extending partially into the opening. The bottom surface acts as a mechanical stop for the top surface of a wafer forced up into the opening by a spring-loaded bottom plate. A spring-loaded plunger mechanism extends through a hole in the frame and inner wall into the opening to contact the side edge of a wafer in the opening and forces the wafer into contact with side-edge mechanical stops.
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