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发明名称
HOLLOW CATHODE ION SOURCE
摘要
申请公布号
JPS5521846(A)
申请公布日期
1980.02.16
申请号
JP19780094606
申请日期
1978.08.04
申请人
HITACHI LTD
发明人
TOIDA HIROSHI
分类号
H01J1/02;H01J1/13;H01J3/04;H01J27/02
主分类号
H01J1/02
代理机构
代理人
主权项
地址
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