APPARATUS FOR ELECTRONIC PROJECTION LITHOGRAPHY,申请号SU19772567149-传众专利搜索

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发明名称	APPARATUS FOR ELECTRONIC PROJECTION LITHOGRAPHY
摘要
申请公布号	SU716018(A1)	申请公布日期	1980.02.15
申请号	SU19772567149	申请日期	1977.12.28
申请人	RYZHOV MIKHAIL N,SU;SUTYRIN VLADIMIR M,SU;RUMOV OLEG T,SU;FEJGIN KHONA ,SU	发明人	RYZHOV MIKHAIL N,SU;SUTYRIN VLADIMIR M,SU;RUMOV OLEG T,SU;FEJGIN KHONA ,SU
分类号	G03G17/00;(IPC1-7):G03G17/00	主分类号	G03G17/00
代理机构		代理人
主权项
地址

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