| 摘要 |
PURPOSE:To keep the high purity of products in the production line while being delivered from one process to another by a method wherein any connecting operations between production processes are automated to remove any adhering dirts enabling consistent production automatic. CONSTITUTION:The influence of adhered dirts on products through a process Pn introducing a dirt checking system between the process Pn and another process Pn+1 is checked if it is represented by a mean value or not further to examine if it is represented by an upper limit value in case it is e.g. a positive value. When it is out of the specified values, the dirts are removed or the product is reworked or discarded. Besides, any products within the specified values may be advanced to the next process Pn+1 but the preceding process Pn itself must be corrected meeting the requirements to be altered. Moreover the acceptable products may be advanced to the next process Pn+1 but any data at that time must be fedback to the preceding process Pn to command that the existing status be kept as it is since it is preferable that there is no dirt at all at the lower limit value. |
