| 摘要 |
PURPOSE:To form >=2 kinds of delay lines which differ in delay time on the same substrate by utilizing an isotropic elastic substrate, electrode provided thereupon, and a Stoneley wave which propagates only on the interface of piezoelectric material on an ultrasonic wave propagation path. CONSTITUTION:The electrode 16 is provided at some part on the isotropic elastic material substrate 10, and then a thin film of piezoelectric material 11 is formed only where the ultrasonic wave propagation path is formed and an electrode 17 is provided on the piezoelectric material 11 to constitute a transducer. Transducers 12a and 12b, and 13a and 13b have triple structure of electrodes 16 and 17 and piezoelectric material. The transducers 12a and 12b have delay lines different from those of the transducers 13a and 13b, and ultrasonic wave propagation paths 14 and 15 differ in delay time. A Stoneley wave propagating only on the interface between the substrate 10 and piezoelectric material 11 is utilized to form delay lines of simple structure which differ in delay time on the same substrate by a method which reduces unnecessary oscillations extremely.
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