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经营范围
发明名称
PELLET HANDLING METHOD
摘要
申请公布号
JPS5516454(A)
申请公布日期
1980.02.05
申请号
JP19780089459
申请日期
1978.07.24
申请人
HITACHI LTD
发明人
HAYASHI SHIYOUJI
分类号
H01L21/67;H01L21/68
主分类号
H01L21/67
代理机构
代理人
主权项
地址
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