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发明名称
INSPECTION METHOD OF EXTERIOR EXAMINER
摘要
申请公布号
JPS5516438(A)
申请公布日期
1980.02.05
申请号
JP19780089431
申请日期
1978.07.24
申请人
HITACHI LTD;HITACHI ELECTR ENG
发明人
SUZUKI SHINPEI;IWAMA SATORU;YOSHIZAKI ZENYA
分类号
G01R31/26;H01L21/66;H01L21/68
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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