| 摘要 |
PURPOSE:To facilitate alignment of the axis of the captioned electrode, by supporting the electrode to a holding frame at plural positions through a spring by means of an adjusting screw, and further pressing the wall face of the holding frame by means of the adjusting screw which is screwed and connected to the electrode placed at right angles to said adjusting screw. CONSTITUTION:A reference electrode 23 is disposed through a spacer 26 in a holding frame 25 which supports a perforated electrode 24, and moreover a holding frame 21 which supports a perforated electrode 22 is disposed through the spacer 26 in order to form a drawer-type electrode for ion source. Also, an adjusting screw 33 is inserted into each of through holes 28 uniformly distributed on its flange 27 through a coned-disc screw 32, and said electrode 22 is screwed into a screw 29 of the holding frame 21 and supported, and is also supported by applying plural adjusting screws 34 to the wall face of the holding frame 21. Consequently, the gap toward the reference electrode 23 can be made constant by adjusting the screw 33, next, the positioning of the hole 35 of said electrode 22 can be performed by means of a screw 34, and thereby the adjusting time can greatly be shortened. |
