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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5516427(A)
申请公布日期
1980.02.05
申请号
JP19780088986
申请日期
1978.07.21
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
MURAMOTO KENICHI;TOMIZAWA YUTAKA;TANI KEIZOU;IWANISHI MASAAKI
分类号
H01L29/417;H01L21/331;H01L29/72;H01L29/73
主分类号
H01L29/417
代理机构
代理人
主权项
地址
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