| 摘要 |
PURPOSE:To perform wire bonding by a tool attached to the top end of an arm by driving the arm up and down in a threaded contact with a vertical shaft by its rotation. CONSTITUTION:A screw 21a is provided in the other circumference of a vertical shaft 21 and the shaft 21 makes rotation by a motor 22 to drive up and down a transmission arm 23. A bonding arm having a bonding tool 25 attached to its one end is supported at a fulcrum of the arm 23 and is adjusted by a spring 26b and screw 23b. The motor 22 is controlled by a signal from P-ROM31 through CPU32 and drive circuit 33. According to this construction, the tool 25 can be set at an accurate position because it may make a linear movement and the rapid recovery can also be made possible because jumping of the tool is prevented with the soft approach. |
