| 摘要 |
PURPOSE:To displace a clamping means precisely by providing clamp means to clamp both sliders moving like a caterpillar on the third slider, and by displacing it with the second piezoelectric element. CONSTITUTION:Both sliders 1-2 are guided by a common guide rail 5 and they go straight on independently. Both ends of the 1st piezoelectric element are fixed between these sliders 1-2. A pickup 4 is fixed onto the 2nd slider 2, whose probe 4a is brought into contact with the reference plane of the 1st slider 1. The 3rd slider 7 is guided with a rail 6 and two electromagnets 8-9 are fixed. On this occasion, both ends of the 2nd voltage element 16 are fixed between the 3rd slider 7 and a fixed section 15. From a control device 12, reference voltage l4 is supplied to the 2nd adder 17. The 4th slider 19 is installed to a feed screw and a pickup 20 is secured. The output l5 energizes the 2nd piezoelectric element 16 through a hole circuit 25, etc., and compensates microdisplacement. |
