(A) ;MEASURING METHOD FOR TEMPERATURE INSIDE FURNACE OF HOT ISOSTATIC PRESSING UNIT,申请号JP19860052407U-传众专利搜索

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发明名称	(A) ;MEASURING METHOD FOR TEMPERATURE INSIDE FURNACE OF HOT ISOSTATIC PRESSING UNIT
摘要
申请公布号	JPS62163935(U)	申请公布日期	1987.10.17
申请号	JP19860052407U	申请日期	1986.04.07
申请人		发明人
分类号	C23F1/08;H01L21/027;H01L21/30;H01L21/304;H01L21/306;(IPC1-7):H01L21/30	主分类号	C23F1/08
代理机构		代理人
主权项
地址

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