| 摘要 |
PURPOSE:To obtain the positive type resist composition having high sensitivity and durability against oxygen plasma by composing the titled composition of a specific polysiloxane polymer and a nitrocellulose or a silicon contg. nitrocellulose. CONSTITUTION:The titled composition is composed of >=1 kind of the siloxane polymer shown by formula I, and >=1 kind of compd. selected from a reaction product of a silicon compd. shown by formula II and the nitrocellulose, and the nitrocellulose. In formula I, R'-R'' are each one kind of the group selected from hydrogen atom and alkyl group. (l), (m), and (n) are 0 or a positive integer. In formula II, R1-R6 are each hydrogen stom, etc., (rho) is an integer of >=1. As the siloxane polymer is soluble to an alkaline solution, the resist in which the siloxane polymer is used therein, enables to carry out an alkaline developing. The resist composed of the silver contg. nitrocellulose shown by formula II is better than the resist contg. the nitrocellulose in compatibility with the siloxane polymer and durability against the oxygen plasma. |
