PROCESS FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE,申请号JP19780085048-传众专利搜索

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发明名称	PROCESS FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPS5512726(A)	申请公布日期	1980.01.29
申请号	JP19780085048	申请日期	1978.07.14
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	MORITA SHIGERU;ENDOU NORIO
分类号	H01L21/76;H01L21/306;H01L21/308;H01L21/316	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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