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发明名称
摘要
申请公布号
JPS5512606(U)
申请公布日期
1980.01.26
申请号
JP19780093507U
申请日期
1978.07.07
申请人
发明人
分类号
H01L21/683;H01L21/02;H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/683
代理机构
代理人
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